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Curated by: Huygens Optics (81 videos)
Before the Carl Zeiss s-planar photo-lithography lens can be used as intended, it is necessary to find a way to get as much light as possible into the optical tube. Another aspect is the uniformity of the projection field. A simple diffuser plate does not work since it is very inefficient: only 0.12% of the light reaches the entrance pupil of the lens. The method that is chosen is by projection of the light source using a large condenser mirror. The mirror used has previously been part of a Perkin Elmer Micralign system, which is also discussed very briefly. The images of the Micralign were taken from the website https://www.chiphistory.org, which contains an incredible amount of information on the history of photolithography machines. It is now possible to contribute financially to the Huygens Optics Youtube channel. Please refer to the "About"-page of the channel for details.