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Currently Playing: Drawing Microscopic Patterns with Electrons

Today we're looking at Electron Beam Lithography using a scanning electron microscope 🥰 CONSIDER SUBSCRIBING 🥰 🔬Patreon if that's your jam: https://www.patreon.com/breakingtaps ☕Or buy me a coffee? https://www.buymeacoffee.com/Breakingtaps 📢Twitter: https://twitter.com/BreakingTaps 📷Instagram: https://instagram.com/breakingtaps 💻Discord: https://discord.gg/R45uCXcEv4 ==== More E-Beam Litho! ==== peterbjornx has recently been converting his SEM to run litho patterns. Particularly interesting since it's very DIY (vs the python api for my machine): - https://twitter.com/peterbjornx/status/1489776638841737217 - https://twitter.com/peterbjornx/status/1487015399388598277 And of course the infamous Sam Zeloof did a video on the topic years ago 🙂 - https://www.youtube.com/watch?v=SB94rQtKlKI ==== Never Gonna Give You Up :) ==== Never Gonna Give You Up remix by Kingdom Power Music (https://www.youtube.com/watch?v=rUWALfala08) Kingdom power music Instagram: https://www.instagram.com/kingdompmusic ==== Timeline ==== 0:00 Intro 2:02 Electron Beam Lithography 4:56 Substrate Choice 6:02 PMMA Resist 7:47 How do e-beam resists work? 9:35 Development 10:47 Results! 14:18 Dose Dependence 15:06 Resist Thickness 15:19 Substrate 15:22 Accelerating Voltage 16:03 Proximity Effect 17:06 Emission Current 17:35 SEM vs EBL 19:50 Fast Beam Blanker 21:13 PMMA dosing - Positive vs Negative resist 22:21 Next Steps 22:49 Curiosity Rover Wheel!